Structural and mechanical properties of TaN/a-CN x multilayer films

Surface and Coatings Technology

Volumn 206, Issue 8-9, 2012, Pages 2242-2248

  Chen, R ^a,b   Tu, J P ^a,b   Liu, D G ^a,b   Yu, Y L ^b   Qu, S X ^b   Gu, C D ^a,b  

^a ZHEJIANG UNIVERSITY   (China)

^b ZHEJIANG UNIVERSITY   (China)

Author keywords

Carbon nitride; Columnar structure; Multilayer; Tantalum nitride; Tribological property

Indexed keywords

ALLOY SUBSTRATES; BALL-ON-DISK; COLUMNAR STRUCTURES; DIRECT CURRENT MAGNETRON SPUTTERING; FRICTION COEFFICIENTS; MAXIMUM HARDNESS; MECHANICAL AND TRIBOLOGICAL PROPERTIES; MODULATION PERIOD; NANOINDENTION; SI WAFER; STRUCTURAL AND MECHANICAL PROPERTIES; TANTALUM NITRIDE; TRIBOLOGICAL PROPERTIES; TRIBOMETERS; WEAR RATES;

CARBON NITRIDE; CRYSTALS; FRICTION; HARDNESS; MULTILAYERS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; TANTALUM; TANTALUM COMPOUNDS; TITANIUM; TITANIUM ALLOYS; TITANIUM NITRIDE; TRANSMISSION ELECTRON MICROSCOPY; TRIBOLOGY; X RAY DIFFRACTION;

MULTILAYER FILMS;

EID: 84855278331     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2011.09.072     Document Type: Article

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