Pulsed DC magnetron sputtered tantalum nitride hard coatings for tribological applications

Surface and Coatings Technology

Volumn 201, Issue 7 SPEC. ISS., 2006, Pages 4401-4405

  Aryasomayajula, Aditya ^a   Valleti, Krishna ^b   Aryasomayajula, Subrahmanyam ^b   Bhat, Deepak G ^a  

^a UNIVERSITY OF ARKANSAS   (United States)

^b INDIAN INSTITUTE OF TECHNOLOGY MADRAS   (India)

Author keywords

Physical vapor deposition; Sputtering; Tantalum nitride; Tribology

Indexed keywords

ATOMIC FORCE MICROSCOPY; PHYSICAL VAPOR DEPOSITION; PROTECTIVE COATINGS; REACTION KINETICS; SPUTTER DEPOSITION; TANTALUM COMPOUNDS; THIN FILMS; TRANSITION METALS; TRIBOLOGY;

BALL-AND-CRATER METHOD; DIFFUSION BARRIER COATING; SCRATCH ADHESION TEST; TANTALUM NITRIDE THIN FILMS; TRANSITION METAL NITRIDE COATINGS;

MAGNETRON SPUTTERING;

ATOMIC FORCE MICROSCOPY; MAGNETRON SPUTTERING; PHYSICAL VAPOR DEPOSITION; PROTECTIVE COATINGS; REACTION KINETICS; SPUTTER DEPOSITION; TANTALUM COMPOUNDS; THIN FILMS; TRANSITION METALS; TRIBOLOGY;

EID: 33751249038     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.08.085     Document Type: Article

References (15)

1. Shibata S., Murasugi K., and Kaminishi K. IEEE Trans. Parts Hybrids Packag. PHP-12 (1976) 223
2. Min K.H., Chun K.C., and Kim K.B. J. Vac. Sci. Technol., B 14 (1996) 3263
3. Lovejoy M.L., Patrizi G.A., Rieger D.J., and Barbour J.C. Thin Solid Films 290 (1996) 513
4. Tsai M.H., Sun S.C., Tsai C.E., Chuang S.H., and Chiu H.T. J. Appl. Phys. 79 (1996) 6932
5. Sheka I.A., Voitovich B.A., and Nisel'son L.A. Russ. J. Inorg. Chem. 4 (1959) 813
6. http://www.cerac.com/pubs/cmn/cmn7_2.htm.
7. Kim S.K., and Cha B.C. Thin Solid Films 475 (2004) 202
8. Lu Y.M., Weng R.J., Hwang W.S., and Yang Y.S. Thin Solid Films 398-399 (2001) 356
9. Sharma S.P., Cruden B.A., Rao M.V.V.S., and Bolshakov A.A. J. Appl. Phys. 95 (2004) 3324
10. Nakano T., Ohnuki N., and Baba S. Vacuum 59 (2000) 581
11. Griem H.R. Plasma Spectroscopy (1964), McGraw-Hill, New York 129
12. Suryanarayana C., and Grant M.G. X-ray Diffraction, A Practical Approach (1998), Plenum Press, New York, NY 207
13. Noda S., Tepsanongsuk K., Tsui Y., Kajikawa Y., Ogawa Y., and Komiyama H. J. Vac. Sci. Technol., A 22 2 (2004) 332
14. Bunshah R.F. Handbook of Hard Coatings (2000), William Andrew Publishing, division of Noyes Publications, Park Ridge, NJ 518
15. L.J.A. Naveenan, Kennametal-Widia (India), Ltd., Personal Communication (2005).