Adhesion and fracture of tantalum nitride films

Acta Materialia

Volumn 46, Issue 2, 1998, Pages 585-597

  Moody, N R ^a   Hwang, R Q ^a   Venka Taraman, S ^a,b   Angelo, J E ^a,b   Norwood, D P ^a,c   Gerberich, W W ^a,b  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b UNIVERSITY OF MINNESOTA   (United States)

^c SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ANNEALING; COMPRESSIVE STRESS; FRACTURE TESTING; NITRIDES; RESIDUAL STRESSES; SPUTTER DEPOSITION; STRAIN RATE; SURFACE PROPERTIES; THIN FILMS;

CONTINUOUS NANOSCRATCH TESTING; TANTALUM NITRIDE;

TANTALUM COMPOUNDS;

EID: 0032484308     PISSN: 13596454     EISSN: None     Source Type: Journal    
DOI: 10.1016/s1359-6454(97)00243-7     Document Type: Article

References (47)

1. Mittal, K. L., Electrocomponent Sci. Technol., 1976, 3, 21.
2. Evans, A. G. and Ruhle, M., MRS Bull., 1990, XV(10), 46.
3. Tremble, K. P., Ruhle, M., Metal-Ceramic Interfaces. Pergamon Press, Oxford, 1990, p. 144. .
4. Adams, J. R. and Kramer, D. K., Surf. Sci., 1976, 56, 482.
5. Au, C. L., Anderson, W. A., Schmitz, D. A., Flassayer, J. C. and Collins, F. M., J. Mater. Res., 1990, 5, 1224.
6. Sun, R. C., Tisone, T. C. and Cruzan, P. D., J. appl. Phys., 1975, 46, 112.
7. Klokholm, E., J. Vac. Sci. Technol., 1971, 8, 148.
8. Brady, D. P., Fuss, F. N. and Gerstenberg, D., Thin Solid Films, 1980, 66, 287.
9. Cao, H. C. and Evans, A. G., Mech. Mater., 1989, 7, 295.
10. Charalambides, P. G., Lund, J., Evans, A. G. and McMeeking, R. M., J. appl. Mech., 1989, 56, 77.
11. Suo, Z. and Hutchinson, J. W., Mater. Sci. Engng, 1989, A107, 135.
12. Doerner, M. F. and Nix, W. D., J. Mater. Res., 1986, 1, 601.
13. Oliver, W. C. and Pharr, G. M., J. Mater. Res., 1992, 7, 1564.
14. Venkataraman, S. K., Kohlstedt, D. L. and Gerberich, W. W., J. Mater. Res., 1993, 8, 685.
15. Wu, T. W., Hwang, C., Lo, J. and Alexopoulos, P. S., Thin Solid Films, 1988, 166, 299.
16. Wu, T. W., J. Mater. Res., 1991, 6, 407.
17. Venkataraman, S. K., Kohlstedt, D. L. and Gerberich, W. W., J. Mater. Res., 1992, 7, 1126.
18. Venkataraman, S. K., Kohlstedt, D. L. and Gerberich, W. W., Thin Solid Films, 1993, 223, 269.
19. Marshall, D. B. and Evans, A. G., J. appl. Phys., 1984, 56, 2632.
20. Evans, A. G. and Hutchinson, J. W., Int. J. Solids Struct., 1984, 20, 455.
21. Hutchinson, J. W. and Suo, Z., in Advances in Applied Mechanics, Vol. 29, Academic Press Inc., New York, 1992, p. 64.
22. Massalski, T. B., Binary Alloy Phase Diagrams. 2nd edn. ASM International, Metals Park, 1990.
23. Angelo, J. E., Moody, N. R., Venkataraman, S. K. and Gerberich, W. W., Mater. Res. Soc. Proc., 1995, 357, 195.
24. Baretsky, B., Max-Planck Institut fur Metallforschung, Stuttgart, Germany, 1996.
25. Zhao, X-A., Kolawa, E. and Nicolte, M-A., J. Vac. Sci. Technol. A., 1986, 4, 3139.
26. Grinfel'd, M. A., Sov. Phys. Dokl., 1988, 31, 831.
27. Chiu, C-H. and Gao, H., Mater. Res. Soc. Symp. Proc., 1995, 356, 33.
28. Yang, W. H. and Srolovitz, D. J., Phys. Rev. Lett., 1993, 71, 1593.
29. Jonsdottir, F., Mater. Res. Soc. Symp. Proc., 1995, 356, 45.
30. Grilhe, J., Acta metal. mater., 1993, 41, 909.
31. Harvey, S. E., Angelo, J. E. and Gerberich, W. W., Mater. Res. Soc. Symp. Proc, 1995, 308, 433.
32. Zhang, Y., Gerberich, W. W. and Shores, D. A., J. Mater. Res, 1997, 12, 697.
33. Bahr, D. F., Hoehn, J. W., Moody, N. R. and Gerberich, W. W., Acta mater., in press.
34. Thornton, J. A. and Hoffman, D. W., J. Vac. Soc. Technol., 1977, 14, 164.
35. Cardinale, D. F., Howitt, D. G., McCarty, K. F., Medlin, D. L., Mirkarimi, P. B. and Moody, N. R., Diamond and Related Mater., 1996, 5, 1295.
36. Messaoudi, K., Huntz, A. M., Lesage, B., Haut, C., Lebrun, J. L. and Ji, V., Corrosion-Deformation Interactions. The Institute of Metals, London, in press.
37. Burnett, P. J. and Rickerby, D. S., Thin Solid Films, 1988, 157, 233.
38. Moody, N. R., Medlin, D. and Norwood, D. P., Mater. Res. Soc. Symp. Proc., 1997, 436, 97.
39. Wang, M., Schmidt, K., Reichelt, K., Dimigen, H. and Hubsch, H., J. Mater. Res., 1992, 7, 667.
40. O'Hern, M. E., Parrish, R. H. and Oliver, W. C., Thin Solid Films, 1989, 181, 357.
41. Philip, P. K., Wear, 1978, 47, 45.
42. Venkataraman, S. K., Nelson, J. C., Moody, N. R., Kohlstedt, D. L. and Gerberich, W. W., Mater. Res. Soc. Symp. Proc., 1994, 343, 597.
43. Bull, S. J., Rickerby, D. S., Matthews, A., Leyland, A., Pace, A. R. and Valli, J., Surface and Coatings Technol., 1988, 36, 503.
44. Timoshenko, S. and Goodier, J. N., Theory of Elasticity 3rd edn., McGraw-Hill Book Company, New York, 1970, p. 127.
45. Evans, A. G., Ruhle, M., Dalgleish, B. J. and Charalambides, P. G., Metal-Ceramic Interfaces. Pergamon Press, Oxford, 1990, p. 345.
46. Thouless, M. D., Hutchinson, J. W. and Liniger, E. G., Acta metal. mater., 1992, 40, 2639.
47. Evans, A. G. and Hutchinson, J. W., Acta metall., 1989, 37, 909.