Microstructure, mechanical and tribological properties of CrN/W2N multilayer films deposited by DC magnetron sputtering

Surface and Coatings Technology

Volumn 204, Issue 4, 2009, Pages 470-476

  Li, R L ^a   Tu, J P ^a   Hong, C F ^a   Liu, D G ^a   Sun, H L ^b  

^a ZHEJIANG UNIVERSITY   (China)

^b TEER COATINGS LTD   (United Kingdom)

Author keywords

Bilayer period; Magnetron sputtering; Mechanical property; Metal nitride; Multilayer; Tribological property

Indexed keywords

ADHESION STRENGTHS; ADHESIVE STRENGTH; ATOM DIFFUSION; BALL-ON-DISK; BILAYER PERIOD; CLOSED FIELD UNBALANCED MAGNETRON SPUTTERING; DC MAGNETRON SPUTTERING; FRICTION COEFFICIENTS; HIGH-SPEED STEELS; LAYER INTERFACES; MECHANICAL AND TRIBOLOGICAL PROPERTIES; METAL NITRIDE; NANOINDENTOR; ROCKWELL; SCRATCH TEST; SEM; TRIBOLOGICAL PROPERTY; TRIBOMETERS;

ELASTIC MODULI; FRICTION; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; INORGANIC COATINGS; MAGNETRON SPUTTERING; MAGNETRONS; MECHANICAL PROPERTIES; MICROSTRUCTURE; MULTILAYERS; NITRIDES; REFRACTORY METAL COMPOUNDS; SCANNING ELECTRON MICROSCOPY; TRIBOLOGY; WEAR RESISTANCE; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS;

MULTILAYER FILMS;

EID: 70249095577     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2009.08.010     Document Type: Article

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