Tribological behavior of hard W/NbN superlattice films

Tribology Letters

Volumn 38, Issue 3, 2010, Pages 225-229

  Hong, C F ^a   Tu, J P ^a   Li, R L ^a   Liu, D G ^a   Mao, S X ^a,b  

^a ZHEJIANG UNIVERSITY   (China)

^b University of Pittsburgh   (United States)

Author keywords

Hardness; Interface; Superlattice film; Wear

Indexed keywords

BALL-ON-DISK; BI-LAYER; DEFORMABILITY; INTERFACE; MODULATION PERIOD; OPTICAL PROFILER; REACTIVE DC MAGNETRON SPUTTERING; SHARP INTERFACE; SUPER-LATTICE FILMS; SUPERHARDNESS; TRIBOLOGICAL BEHAVIORS; TRIBOMETRY; WEAK INTERFACE; WEAR PROCESS; WEAR PROPERTIES; WEAR RATES; WORN SURFACE;

ATOMIC FORCE MICROSCOPY; DEFORMATION; HARDNESS; MECHANICAL PROPERTIES; MONOLAYERS; NANOINDENTATION; OPTICAL PROPERTIES; SCANNING ELECTRON MICROSCOPY; SUPERLATTICES;

EPITAXIAL FILMS;

EID: 77953686562     PISSN: 10238883     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11249-010-9596-2     Document Type: Article

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