Mechanical and tribological characterization of DC magnetron sputtered tantalum nitride thin films

Surface and Coatings Technology

Volumn 97, Issue 1-3, 1997, Pages 779-784

  Westergard R ^a   Bromark, M ^a   Larsson, M ^a   Hedenqvist, P ^a   Hogmark, S ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

Abrasion; Hardness; PVD coating; Residual stress; Tantalum nitride

Indexed keywords

ADHESION; FAILURE ANALYSIS; HARDNESS; MAGNETRON SPUTTERING; RESIDUAL STRESSES; STEEL; TANTALUM COMPOUNDS; THIN FILMS; TRIBOLOGY; VAPOR DEPOSITION; WEAR RESISTANCE; X RAY DIFFRACTION ANALYSIS;

PHYSICAL VAPOR DEPOSITION (PVD) COATINGS; TANTALUM NITRIDE;

PROTECTIVE COATINGS;

EID: 0031345422     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00338-1     Document Type: Article

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