Synthesis of hard TiN coatings with suppressed columnar growth and reduced stress

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 5, 1999, Pages 2915-2919

  Lacerda, M M ^a   Chen, Y H ^a   Zhou, B ^a   Guruz, M U ^a   Chung, Y W ^a  

^a Northwestern University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033417558     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581960     Document Type: Article

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