Effects of post-deposition annealing on the mechanical and chemical properties of the Si 3 N 4 /NbN multilayer coatings

Applied Surface Science

Volumn 214, Issue 1-4, 2003, Pages 11-19

  Jeong, J J ^a   Lee, C M ^a  

^a Inha University   (South Korea)

Author keywords

Mechanical properties; Multilayers; Thermal effects; Thin Films

Indexed keywords

ADHESION; ANNEALING; ARGON; DIFFUSION; HARDNESS; MULTILAYERS; NIOBIUM COMPOUNDS; NITROGEN; OXIDATION RESISTANCE; OXYGEN; POLYCRYSTALLINE MATERIALS; SILICON NITRIDE; SPUTTERING; STRENGTH OF MATERIALS; THERMAL EFFECTS; THIN FILMS;

MULTILAYER COATINGS;

COATING TECHNIQUES;

EID: 0038519210     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(03)00351-9     Document Type: Article

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