FEM modelling and experimental characterization of microbeams in presence of residual stress

Analog Integrated Circuits and Signal Processing

Volumn 63, Issue 3, 2010, Pages 477-488

  Ballestra, Alberto ^a   Brusa, Eugenio ^b   De Pasquale, Giorgio ^a   Munteanu, Mircea Gh ^b   Somà, Aurelio ^a  

^a POLITECNICO DI TORINO   (Italy)

^b UNIVERSITY OF UDINE   (Italy)

Author keywords

Coupled field analysis; Electromechanical coupling; Finite Element Method; Geometric nonlinearity; Microbeams; Pull in

Indexed keywords

COMPOSITE MICROMECHANICS; ELECTRIC FIELDS; ELECTROMECHANICAL COUPLING; FINITE ELEMENT METHOD; NUMERICAL MODELS; RESIDUAL STRESSES;

COUPLED FIELDS; EXPERIMENTAL CHARACTERIZATION; GEOMETRIC NON-LINEARITY; GEOMETRICAL NON-LINEARITY; MICRO BEAMS; MICROFABRICATION PROCESS; PULL-IN; STATIC AND DYNAMIC BEHAVIOURS;

CHEMICAL SENSORS;

EID: 84655172254     PISSN: 09251030     EISSN: 15731979     Source Type: Journal    
DOI: 10.1007/s10470-009-9420-9     Document Type: Article

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