Capacitance based tunable resonators

Journal of Micromechanics and Microengineering

Volumn 8, Issue 1, 1998, Pages 15-23

  Adams, S G ^a,b   Bertsch, F M ^a   Shaw, K A ^a   Hartwell, P G ^a   Moon, F C ^a   MacDonald, N C ^a  

^a Department of Theoretical and Applied Mechanics and the Cornell Nanofabrication Facility   (United States)

^b NONE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTROSTATIC DEVICES; FAILURE ANALYSIS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; OSCILLATORS (MECHANICAL); STIFFNESS;

MICROMECHANICAL OSCILLATORS;

RESONATORS;

EID: 0032027736     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/8/1/003     Document Type: Article

References (24)

1. Zook J D, Burns D W, Guckel H, Sniegoski J J, Engelstad R L and Feng Z 1991 Resonant microbeam strain transducers 6th Int. Conf. on Solid State Sensors and Actuators (San Francisco, CA, 1991) pp 529-32
2. Sniegowski J J, Guckel H and Christenson T R 1990 Performance characteristics of second generation polysilicon resonating beam force transducers Tech. Digest IEEE Solid-State Sensor and Actuator Workshop (Hilton Head Island, SC, 1990) pp 9-12
3. Petersen K, Pourahmadi F, Brown J, Parsons P, Skinner M and Tudor J 1991 Resonant beam pressure sensor fabricated with silicon fusion bonding 6th Int. Conf. on Solid-State Sensors and Actuators (Transducers '91) (San Francisco, CA, 1991) pp 664-7
4. Dufor M, Delaye M T, Michel F, Danel J S, Diem B and Delapierre G 1992 A comparison between micromachined pressure sensors using quartz of silicon vibrating beams Sensors Actuators A 34 201-9
5. Howe R T and Muller R S 1986 Resonant-microbridge vapor sensor IEEE Trans. Electron Devices ED-33 499-506
6. Lin L, Nguyen C T-C, Howe R T and Pisano A P 1992 Micro electromechanical filters for signal processing Proc. 5th Int. Workshop on MEMS, MEMS '92 (Travemunde, 1992) pp 226-31
7. Nguyen C T-C and Howe R T 1994 Design and performance of CMOS micromechanical resonator oscillators Proc. IEEE Int. Frequency Control Symp. (Boston, MA, 1994) pp 127-34
8. Pember A, Smith J and Kemhadijian H 1995 Study of the effect of boron doping on the aging of micromachined silicon cantilevers Appl. Phys. Lett. 66 577-9
9. Buser R A and Dommann A 1993 Accurate microscopic method to investigate the aging of micromachined silicon actuators 7th Int. Conf. on Solid-State Sensors and Actuators, Transducers '93 (Yokohama, 1993) pp 172-4
10. Yong Y K and Vig J R 1989 Resonator surface contamination - a cause of frequency fluctuations? IEEE Trans. Ultrason. Ferroelectr. Freq. Control UFFC-36 452-8
11. Woodson H H and Melcher J R 1968 reprint edn Electromechanical Dynamics, Part III: Elastic and Fluid Media (Malabar, FL: Krieger)
12. Nguyen C T-C and Howe R T 1993 Microresonator frequency control and stabilization using an integrated micro oven 7th Int. Conf. on Solid-State Sensors and Actuators, Transducers '93 (Yokohama, 1993) pp 1040-3
13. Yao J J and MacDonald N C 1995 A micromachined, single-crystal silicon, tunable resonator J. Micromech. Microeng. 5 257-64
14. Adams S G, Bertsch F M, Shaw K A, Hartwell P G, MacDonald N C and Moon F C 1995 Capacitance based tunable micromechanical resonators 8th Int. Conf. on Solid-State Sensors and Actuators, Transducers '95 (Stockholm, 1995) pp 438-41
15. Adams S G, Bertsch F M and MacDonald N C 1994 Independent tuning of the linear and nonlinear stiffness coefficients of a micromechanical device 9th Annu. Int. Workshop on MEMS, MEMS '96 (San Diego, CA, 1994) pp 32-7
16. Adams S G 1996 Design of electrostatic actuators to tune micro-electro-mechanical systems PhD Thesis Cornell University
17. Hirano T, Furuhata T, Gabriel K J and Fujita H 1992 Design, fabrication, and operation of submicron gap comb-drive microactuators J. MEMS 1 52-9
18. Tang W C, Lin M and Howe R T 1992 Electrostatic comb drive levitation and control method J. MEMS 1 170-8
19. Yoshida T, Kudo T, Kato S, Miyazaki S I, Kiyono S and Ikeda K 1995 Strain sensitive resonant gate transistor Proc. 8th Int. Workshop on MEMS, MEMS '95 (Amsterdam, 1995) pp 316-21
20. Shaw K W, Zhang Z L and MacDonald N C 1994 SCREAM I: a single mask, single-crystal silicon, reactive ion etching, and metalization process for microelectromechanical structures Sensors Actuators A 40 63-70
21. Adams S G, Hui C Y and MacDonald N C 1995 Simulation of micro electro mechanical systems using a hybrid BEM/FEM code with application to the stability analysis of a tunable oscillator Int. Mechanical Engineering Congress Exposition, IMECE '95: Symp. on Micro-Mechanical Systems (San Francisco, CA, 1995) (ASME) ed T E Alberts pp 931-40
22. Southwell R V 1932 On the analysis of experimental observations in problems of elastic stability Proc. R. Soc. A 135 601
23. Fan L S and Crawforth L 1993 Spring-softening effect in MEMS microstructures 7th Int. Conf. on Solid-State Sensors and Actuators, Transducers '93 (Yokohama, 1993) pp 767-9
24. Wang Y C, Adams S, Thorpe J S, MacDonald N, Hertwell P and Bertsch F 1997 Chaos in MEMS, parameter estimation and application in secure communications IEEE Trans. Circuits Syst. at press