Innovative design and modelling of a micromechanical relay with electrostatic actuation

Journal of Micromechanics and Microengineering

Volumn 11, Issue 4, 2001, Pages 428-433

  Sattler, Robert ^a   Voigt, Peter ^a   Pradel, Helmut ^b   Wachutka, Gerhard ^a  

^a TECHNICAL UNIVERSITY OF MUNICH   (Germany)

^b FRAUNHOFER INSTITUTE FOR MICROELECTRONIC CIRCUITS AND SYSTEMS   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; COMPUTER SIMULATION; ELECTRIC RELAYS; ELECTROMECHANICAL DEVICES; FINITE ELEMENT METHOD; MICROMACHINING;

MICROMECHANICAL RELAYS;

ELECTROSTATIC ACTUATORS;

EID: 0035397337     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/11/4/325     Document Type: Article

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