Simulation, design and fabrication of electroplated acceleration switches

Journal of Micromechanics and Microengineering

Volumn 7, Issue 3, 1997, Pages 237-239

  Tonnesen T ^a   Ludtke O ^a   Noetzel, J ^a   Binder, J ^a   Mader, G ^b  

^a UNIVERSITY OF BREMEN   (Germany)

^b SIEMENS AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; COMPUTER SIMULATION; INTEGRATED CIRCUIT MANUFACTURE; MICROELECTROMECHANICAL DEVICES; PHOTORESISTS; SENSORS;

ELECTROPLATED ACCELERATION SWITCHES;

SEMICONDUCTOR SWITCHES;

EID: 0031224230     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/7/3/042     Document Type: Article

References (5)

1. Härtl A, Franz J and Vogt R 1991 Application of an electronic accelerometer for a single point sensing airbag electronic control unit Sensors Expo Proc. (Chicago) October 1-3
2. Maciossek A, Löchel B, Quenzer H J, Wagner B, Schulze S and Noetzel J 1995 Galvanoplating and sacrificial layers for surface micromachining Microelectron. Eng. 27 503-8
3. Noetzel J, Tønnesen T, Benecke W, Binder J and Mader G 1996 Quasianalog accelerometer using microswitch array Sens. Actuators A 54 503-8
4. Schulze S, Noffke M, Noetzel J, Tønnesen T and Benecke W 1996 Packaging of moveable structures by low temperature silicon-silicon bonding Micro System Technologies 96 (Potsdam) 1996 pp 325-9
5. Tønnesen T, Noetzel J, Frischmuth G, Schulze S and Binder J 1996 Fabrication and characterization of acceleration switches Micro System Technologies 96 (Potsdam) 1996 pp 375-8