Determination of the elastic modulus of thin film materials using self-deformed micromachined cantilevers

Journal of Micromechanics and Microengineering

Volumn 9, Issue 3, 1999, Pages 230-235

  Fang, Weileun ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000168554     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/9/3/303     Document Type: Article

References (20)

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