Comparison of scanning microscopy cantilever force constants determined using a nanoindentation testing apparatus

Journal of Micromechanics and Microengineering

Volumn 10, Issue 1, 2000, Pages 85-92

  Holbery, J D ^a,b   Eden, V L ^c  

^a University of Washington   (United States)

^b CSEM   (Switzerland)

^c ESR Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; PRECISION ENGINEERING; UNCERTAIN SYSTEMS;

NANOINDENTATION TESTING; SCANNING MICROSCOPY CANTILEVER FORCE CONSTANTS;

MICROMACHINING;

EID: 0033908349     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/10/1/312     Document Type: Article

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