Electrostatic parallel-plate actuators with large deflections for use in optical moving-fibre switches

Journal of Micromechanics and Microengineering

Volumn 11, Issue 4, 2001, Pages 323-328

  Hoffmann, M ^a   Nusse D ^a   Voges, E ^a  

^a TU DORTMUND UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRIC POTENTIAL; FABRICATION; ITERATIVE METHODS; MICROMACHINING; OPTICAL FIBERS; OPTICAL SWITCHES; SEMICONDUCTING SILICON;

BULK MICROMACHINING;

ELECTROSTATIC ACTUATORS;

EID: 0035397587     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/11/4/306     Document Type: Article

References (7)

1. Optical fibre switches based on full wafer silicon micromachining
2. Compact latching type single-mode fiber switches and their applications in subscriber loop networks
3. Bistable micromechanical fiber-optic switches on silicon with thermal actuators
4. Dynamic micromechanics on silicon: Techniques and devices
5. Micro-opto mechanical switch integrated on silicon
6. Electrostatic curved electrode actuators