Geometrical nonlinearities of electrostatically actuated microbeams

ECCOMAS 2004 - European Congress on Computational Methods in Applied Sciences and Engineering

Volumn , Issue , 2004, Pages

  Munteanu, Mircea Gh ^a,b   Brusa, Eugenio ^b   Collenz, Andrea ^b   De Bona, Francesco ^b  

^a TRANSILVANIA UNIVERSITY OF BRASOV   (Romania)

^b UNIVERSITY OF UDINE   (Italy)

Author keywords

Computational methods; Coupled fields analysis; Electromechanical coupling; FEM; MEMs; Microsystems; Nonlinear analysis

Indexed keywords

COMPUTATION TIME; COUPLED FIELD ANALYSIS; COUPLED-FIELDS ANALYSIS; GEOMETRICAL NON-LINEARITY; GEOMETRICALLY NONLINEAR; INCREMENTAL APPROACH; NONLINEAR DEPENDENCE; STRUCTURAL DOMAINS;

ELECTRIC FIELDS; ELECTROMECHANICAL COUPLING; ELECTROSTATIC ACTUATORS; FINITE ELEMENT METHOD; MEMS; MICROSYSTEMS; NONLINEAR ANALYSIS; NUMERICAL METHODS;

COMPUTATIONAL METHODS;

EID: 84893499298     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)

1. A. Collenz, F. De Bona, A. Gugliotta, A. Somà, "Large defletions of microbeams under electrostatic loads,", J. Micromechanics and Microengineering, 14, 365-373, 2004.
2. S.D. Senturia, Microsystem design, Kluwer Academic Publishers, 2000.
3. Tai-Ran Hsu, MEMs and microsystems - Design and Manufacture, McGraw Hill, 2002.
4. B. Choi, E.G. Lovell, "Improved analysis of microbeams under mechanical and electrostatic loads,", J. Micromechanics and Microengineering, 7, 24-29, 1997.
5. Shi, Ramesh, Mukherjee "Dynamic analysis of micro-electro-mechanical system,", Int. Journal of Numerical Methods in Engineering, 39, 4119-4139, 1996.
6. G.K. Ananantasuresh, R. Gupta, S. Senturia, "An approach to macromodeling of MEMS for nonlinear dynamic simulation," DSC-Vol. 59 Micromechanical Systems (MEMS), ASME, 401-407, 1996.
7. J.D. Grade, H. Jerman, T.W. Kenny, "Design of large deflection electrostatic actuators," J. Micromechanics and Microengineering, 12, 335-343, 2003.
8. E.R. Konig, G. Wachtutka, "Analysis of unstable behaviour occurring in electromechanical microdevices,", Proc. MSM '99 Conference, Puerto Rico, USA, 1999.
9. M. Gyimesi, D. Ostergaard, "Electromechanical transducers for MEMs analysis in ANSYS,", Proc. MSM '99 Conference, 270-276, Puerto Rico, USA, 1999.
10. M.I. Younis, E.M. Abdel-Rahman, A. Nayfeh, "A reduced-order model for electrically actuated microbeam-based MEMS,", J. of Microelectromechanical Systems, 12, 672-680, 2003.
11. M. Gh. Munteanu, F. De Bona and S. Zelenika. An accurate nonlinear analysis of very large displacements of beam systems. Proceedings of the XXV AIAS National Conference, International Conference on Material Engineering, Gallipoli, Italy, 59-66.
12. A. Barraco and M. Gh. Munteanu. A special finite element for static and dynamic study of mechanical systems under large motion. Part 1, Revue Européenne des Elements Finis, Vol 11-no 6/2002, Part 1 pp. 773-790.
13. M. Gh. Munteanu and A. Barraco. A special finite element for static and dynamic study of mechanical systems under large motion. Part 2, Revue Européenne des Elements Finis, Vol 11-no 6/2002, Part 2 pp. 791-814.
14. A. Barraco. Dynamique des systèmes mécaniques complexes. ENSAM, Centre d'enseignement et de recherche de Paris, 1996.
15. CoventorWare™, User's Manual, 2003.