Power output force generation by a MEMS phase change actuator

Journal of Microelectromechanical Systems

Volumn 20, Issue 6, 2011, Pages 1287-1297

  Weiss, Leland W ^a   Richards, Cill D ^b   Richards, Robert F ^b  

^a Louisiana Tech University   (United States)

^b Washington State University   (United States)

Author keywords

Actuator; engine; microelectromechanical systems (MEMS); phase change

Indexed keywords

APPLIED FORCES; FORCE GENERATION; HIGH-SPEED; LOW TEMPERATURES; MECHANICAL POWER; MEMBRANE MATERIAL; MICRO FLUIDIC SYSTEM; MICROELECTROMECHANICAL SYSTEMS (MEMS); OPERATING SPEED; PHASE CHANGE; PHASE-CHANGE ACTUATOR; POWER OUT PUT; TACTILE DISPLAY; THIN MEMBRANE; WORKING FLUID;

DISPLAY DEVICES; ENGINES; FLUIDS; MEMBRANES; MEMS; MICROELECTROMECHANICAL DEVICES; SILICON NITRIDE; THERMOELECTRIC POWER;

ACTUATORS;

EID: 82455171961     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2011.2167660     Document Type: Article

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