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Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2010, Pages 608-611

A membrane type SI-mems tactile imager with fingerprint structure for realization of slip sensing capability

(5) Okada, Hiroki a Yawata, Masaki a Ishida, Makoto a Sawada, Kazuaki a Takao, Hidekuni a,b

a TOYOHASHI UNIVERSITY OF TECHNOLOGY (Japan)

b KAGAWA UNIVERSITY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BASIC PRINCIPLES; CROSS-AXIS SENSITIVITY; FEM ANALYSIS; HIGH SPATIAL RESOLUTION; HORIZONTAL AXIS; INPUT FORCES; INTEGRATING SENSORS; MEMBRANE SENSORS; MEMBRANE TYPES; MEMS INTEGRATED; MULTI-AXIS; PIXEL ARRAYS; ROTATIONAL MOTION; SILICON MEMBRANES; STRAIN GAUGE; TACTILE IMAGER;

GAGES; MECHANICAL ENGINEERING; MECHANICS; PIXELS; REACTIVE ION ETCHING;

SENSORS;

EID: 77952747425 PISSN: 10846999 EISSN: None Source Type: Conference Proceeding
DOI: 10.1109/MEMSYS.2010.5442333 Document Type: Conference Paper

Times cited : (12)

References (9)

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