Large-force, fully-integrated MEMS magnetic actuator

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 793-796

  Wright, John A ^a   Tai, Yu Chong ^a   Chang, Shih Chia ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONTACTS; ELECTRIC RESISTANCE; FABRICATION; MAGNETIC PERMEABILITY; MATERIALS TESTING; MICROELECTROMECHANICAL DEVICES; MICROMACHINING;

ACTUATION FORCE; CANTILEVER BEAM; ELECTROMAGNETIC ACTUATOR; ELECTROMAGNETIC COIL; EXTRAPOLATION; MICRORELAY;

ACTUATORS;

EID: 0030700078     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)