Design and pressure analysis for bulk-micromachined electrothermal hydraulic microactuators using a PCM

Sensors and Actuators, A: Physical

Volumn 133, Issue 2 SPEC. ISS., 2007, Pages 294-300

  Lee, Jun Su ^a   Lucyszyn, Stepan ^a  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

Hydraulic pressure; Microgripper; Micropipette; Microvalve; Paraffin wax microactuator

Indexed keywords

FLUIDICS; HYDRAULIC EQUIPMENT; MICROELECTRONICS; MICROMACHINING; PRESSURE DISTRIBUTION;

HYDRAULIC PRESSURE; MICROGRIPPERS; MICROPIPETTES; MICROVALVES; PARAFFIN WAX MICROACTUATOR;

MICROACTUATORS;

EID: 33846474229     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.06.018     Document Type: Article

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