A tunable range/sensitivity CMOS-MEMS capacitive tactile sensor with polymer fill-in technique

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 2190-2193

  Liu, Yu Chia ^a   Sun, Chih Ming ^a   Lin, Li Yuan ^a   Tsai, Ming Han ^a   Fang, Weileun ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

CMOS MEMS; Polymer fill in; Tunable tactile sensor

Indexed keywords

CAPACITIVE TYPE; CMOS PROCESSS; CMOS-MEMS; FABRICATION PROCESS; FILLING PROCESS; MEASUREMENT RESULTS; POLYMER MATERIALS; POST-CMOS; SENSING CIRCUITS; SENSING RANGES; TACTILE SENSORS;

ACTUATORS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSYSTEMS; PIEZOELECTRIC TRANSDUCERS; POLYMERS; SILICONES;

SOLID-STATE SENSORS;

EID: 71449116924     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285611     Document Type: Conference Paper

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