Characterization and modeling of a microcapillary driven liquid-vapor phase-change membrane actuator

Sensors and Actuators, A: Physical

Volumn 134, Issue 1, 2007, Pages 201-212

  Whalen, S A ^a   Richards, C D ^b   Bahr, D F ^b   Richards, R F ^b  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b Washington State University   (United States)

Author keywords

Efficiency; MEMS actuator; Microcapillary; Phase change

Indexed keywords

ACTUATORS; MATHEMATICAL MODELS; PHASE TRANSITIONS; PRESSURE EFFECTS; SILICON NITRIDE; THERMAL CONDUCTIVITY;

ACTUATOR EFFICIENCY; MEMBRANE THERMAL MASS; PHASE CHANGE ACTUATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 33847311779     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.04.038     Document Type: Article

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