Dome shaped touch sensor using PZT thin film made by hydrothermal method

Proceedings - IEEE International Conference on Robotics and Automation

Volumn 1, Issue , 2001, Pages 577-582

  Kwon, G ^a   Arai, F ^a   Fukuda, T ^a   Itoigawa, K ^a   Thukahara, Y ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

Hydrothermal method; Micro sensor; PZT thin film; Touch sensor; Vibration

Indexed keywords

ACTUATORS; CAPACITANCE; ELECTRIC IMPEDANCE; ELECTROSTATICS; HYDROTHERMAL SYNTHESIS; INDUCTANCE; MICROSENSORS; THIN FILMS; VIBRATIONS (MECHANICAL);

TOUCH SENSORS;

CONTACT SENSORS;

EID: 0034873559     PISSN: 10504729     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. Tactile sensing with minimal wiring complexity
2. New contact sensor in organic/inorganic composite system (in Japanese)
3. Primary development of viscoelastic robot skin with vibrotactile sensation of pacinian/ non-pacinian channels
4. A rod-shaped vibro touch sensor using PZT thin film
5. Parallel beam micro sensor/actuator unit using PZT thin films and application examples
6. Analysis of bending displacement of lead zirconate titanate thin film synthesized by hydrothermal method