A MEMS-based micro heat engine with integrated thermal switch

American Society of Mechanical Engineers, Advanced Energy Systems Division (Publication) AES

Volumn , Issue , 2006, Pages

  Weiss, L W ^a   Cho, J H ^a   Morris, D J ^a   Bahr, D F ^a   Richards, C D ^a   Richards, R F ^a  

^a Washington State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ENCAPSULATION; HEAT SINKS; MEMS; SILICON NITRIDE;

INTEGRATED THERMAL SWITCH; MECHANICAL POWER; MECHANICAL WORK OUTPUT; SILICON-NITRIDE MEMBRANES;

HEAT ENGINES;

EID: 85196549201     PISSN: 10716947     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2006-15042     Document Type: Conference Paper

References (6)

1. A. Mehra, X. Zhang, A.A. Ayon, I.A., Waitz, M.A., Schmidt and C.M. Spadaccini, "A Six-Wafer Combustion System for a Silicon Micro Gas Turbine Engine," J.MEMS, Vol.9, No. 4 (2000)
2. H. T. Aichlmayr, D. B. Kittelson, and M. R. Zachariah. "Miniature free-piston homogeneous charge compression ignition engine-compressor concept - Part I: performance estimation and design considerations unique to small dimensions," Chemical Engineering Science Vol. 57 (2002)
3. K. Fu, A. J. Knobloch, F.C. Marinez, D.C. Walther, C. Fernandez-Pello, A.P. Pisano, D. Liepmann, "Design and Fabrication of a Silicon-Based MEMS Rotary Engine," Proc. ASME IMECE 2001, Paper No. MEMS-23925, New York (2001).
4. T. S. Wiser. "Steady State Heat Transfer Characterization of a Liquid-Metal Thermal Switch," MS Thesis, Washington State University, 2005.
5. L. W. Weiss, J.H. Cho, K. E. McNeil, D.F. Bahr, C.D. Richards and R.F. Richards. "Characterization of a dynamic micro heat engine with integrated thermal switch." Journal of Micromechanics and Microengineering. 2006, 16 S262-S269
6. S.A. Whalen, D.F. Bahr, C.D. Richards, and R.F.Richards, "Characterization of a Liquid-Vapor Phase-Change Actuator," Proc. of ASME IMECE, Florida, U.S.A., Nov. 5-11, 2005, Paper No. IMECE-82564