Bubble driven arrayed actuator device for a tactile display

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 2171-2174

  Ukai, S ^a   Imamura, T ^a   Shikida, M ^a   Sato, K ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

Bubble; Parylene C; PDMS; Tactile display

Indexed keywords

DIAPHRAGMS; DISPLAY DEVICES; DRIVES; LIQUID PHASE EPITAXY; MICE (COMPUTER PERIPHERALS); MICROSYSTEMS; NEEDLES; PLATES (STRUCTURAL COMPONENTS); SENSORS; TRANSDUCERS;

BOTTOM PLATES; BUBBLE; FLEXIBLE MEMBRANES; INPUT ENERGY; INTERNATIONAL CONFERENCES; LIQUID-VAPOR PHASE CHANGES; MICRO HEATERS; MICRO NEEDLES; PARYLENE-C; PDMS; SOLID-STATE SENSORS; TACTILE DISPLAY; TACTILE DISPLAYS;

ACTUATORS;

EID: 50049121537     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300597     Document Type: Conference Paper

References (5)

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5. Y. Ikei and S. Fukuda, "Tactile Display for a Surface Texture Sensation," Proc. 1997 ASME Design Eng. Technical Conf, pp. 1-8, 1997.