A strain amplifying piezoelectric MEMS actuator

Journal of Micromechanics and Microengineering

Volumn 17, Issue 4, 2007, Pages 781-787

  Conway, Nicholas J ^a   Traina, Zachary J ^a   Kim, Sang Gook ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FILM THICKNESS; FORCE CONTROL; LEAD COMPOUNDS; MEMS; STRAIN CONTROL; THIN FILMS;

ACTUATOR CELLS; MAXIMUM BLOCKING FORCE; STRAIN AMPLIFICATION RATIO;

PIEZOELECTRIC ACTUATORS;

EID: 34249034335     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/4/015     Document Type: Conference Paper

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