A silicon microturbopump for a rankine-cycle power-generation microsystempart II: Fabrication and characterization

Journal of Microelectromechanical Systems

Volumn 20, Issue 1, 2011, Pages 326-328

  Lee, Changgu ^a   Liamini, Mokhtar ^b   Frechette, Luc G ^b  

^a Sungkyunkwan University   (South Korea)

^b UNIVERSITÉ DE SHERBROOKE   (Canada)

Author keywords

Heat engines; microfluidics; micropumps; power generation; turbines

Indexed keywords

ALIGNMENT STRUCTURE; ANODIC BONDING; BLADE ROW; CONSTANT EFFICIENCY; DEEP REACTIVE ION ETCHING; DESIGN APPROACHES; DIFFERENTIAL PRESSURES; EXPERIMENTAL CHARACTERIZATION; FUSION BONDING; GLASS WAFER; MANUAL ASSEMBLY; MAXIMUM PRESSURE; MECHANICAL POWER; MICRO TURBINE; MICROMACHINES; MICROPUMPS; OPERATING RANGES; PERFORMANCE TESTS; PRESSURIZED WATER; PUMP FLOW RATE; PUMP PERFORMANCE; PYREX GLASS; RANKINE; SILICON ON INSULATOR WAFERS; SOI WAFERS; STATIC AND DYNAMIC; SYSTEM LEVELS; TIP SPEED; TOTAL POWER; TURBO PUMPS; VISCOUS DRAG; VISCOUS PUMP;

BEARINGS (STRUCTURAL); COLD STORAGE; COMPRESSED AIR; ELECTRON BEAM LITHOGRAPHY; GLASS; HEAT ENGINES; HYDROSTATIC BEARINGS; MICROFLUIDICS; PNEUMATICS; PRESSURE VESSELS; PUMPS; REACTIVE ION ETCHING; ROTORS; SEMICONDUCTING SILICON COMPOUNDS; TURBINES; WAFER BONDING;

SILICON WAFERS;

EID: 79551593024     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2010.2093562     Document Type: Article

References (18)

1. C. Lee and L. G. Fréchette, "A silicon microturbopump for a Rankinecycle power generation microsystem-Part I: Component and system design," J. Microelectromech. Syst., vol. 20, no. 1, pp. 312-325, Feb. 2011.
2. K. E. Peterson, "Silicon as a mechanical material," Proc. IEEE, vol. 70, no. 5, pp. 420-457, May 1982.
3. L. G. Fréchette, S. A. Jacobson, K. S. Breuer, F. F. Ehrich, R. Ghodssi, R. Khanna, C. W. Wong, X. Zhang, M. A. Schmidt, and A. H. Epstein, "High-speed microfabricated silicon turbomachinery and fluid film bearings," J. Microelectromech. Syst., vol. 14, no. 1, pp. 141-152, Feb. 2005.
4. P. Kang, S. Tanaka, and M. Esashi, "Demonstration of a MEMS-based turbocharger on a sing rotor," J. Micromech. Microeng., vol. 15, no. 5, pp. 1076-1087, May 2005.
5. N. Savoulides, S. A. Jacobson, H. Li, L. Ho, R. Khanna, C.-J. Teo, J. M. Protz, L. Wang, D. Ward, M. A. Schmidt, and A. H. Epstein, "Fabrication and testing of a high-speed microscale turbocharger," J. Microelectromech. Syst., vol. 17, no. 5, pp. 1270-1282, Oct. 2008.
6. A. Deux, "Design of a silicon microfabricated rocket engine turbopump," M.S. thesis, MIT, Cambridge, MA, 2001.
7. L. Jamonet, "Testing of a microrocket engine turbopump," M.S. thesis, MIT, Cambridge, MA, 2001.
8. S. Diez, "Preliminary performance characteristics of a microfabricated turbopump," M.S. thesis, MIT, Cambridge, MA, 2003.
9. C. Lee, M. Liamini, and L. G. Fréchette, "Design, fabrication, and characterization of a microturbopump for a Rankine cycle micro power generator," in Proc. Solid State Sens., Actuator, Microsyst. Workshop, Hilton Head Island, SC, Jun. 4-8, 2006, pp. 276-279.
10. C. Lee, "Development of a microfabricated turbopump for a Rankine vapor power cycle," Ph.D. dissertation, Columbia Univ., New York, NY, Feb. 2006.
11. Z. S. Spakovszky and L. X. Liu, "Scaling laws for ultra-short hydrostatic gas journal bearings," J. Vib. Acoust., vol. 127, no. 3, pp. 254-261, Jun. 2005.
12. L. G. Fréchette, "Development of a microfabricated silicon motordriven compression system," Ph.D. dissertation, MIT, Cambridge, MA, Sep. 2000.
13. C. C. Lin, "Development of a microfabricated turbine-drive air bearing rig," Ph.D. dissertation, MIT, Cambridge, MA, Jun. 1999.
14. L. Liu, "Theory for hydrostatic gas journal bearings for microelectro-mechanical systems," Ph.D. dissertation, MIT, Cambridge, MA, Sep. 2005.
15. C. Lee, S. Arslan, and L. G. Fréchette, "Design principles and measured performance of multi-stage radial flow microturbomachinery at low Reynolds numbers," J. Fluids Eng., vol. 130, no. 11, p. 111 103, 2008.
16. D. J. Laser and J. G. Santiago, "A review of micropumps," J. Micromech. Microeng., vol. 14, no. 6, pp. R35-R64, Jun. 2004.
17. E. Logan, Turbomachinery-Basic Theory and Applications, 2nd ed. New York: Marcel Dekker, 1993.
18. N. Mueller and L. G. Fréchette, "Performance analysis of Brayton and Rankine cycle microsystems for portable power generation," in Proc. ASME Int. Mech. Eng. Congr. Expo., New Orleans, LA, Nov. 17-22, 2002, pp. 513-522.