MEMS earthworm: A thermally actuated peristaltic linear micromotor

Journal of Micromechanics and Microengineering

Volumn 21, Issue 3, 2011, Pages

  Arthur, Craig ^a   Ellerington, Neil ^a   Hubbard, Ted ^a   Kujath, Marek ^a  

^a DALHOUSIE UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CLAMPING FORCE; EXTERNAL ACTUATORS; INPUT FREQUENCY; INPUT VOLTAGES; LATERAL THRUST; MICROELECTROMECHANICAL SYSTEMS; MICROMOTOR; RANGE OF MOTIONS; SPECIFIC SEQUENCES; THERMAL ACTUATOR;

MACHINE DESIGN; MEMS;

ACTUATORS;

EID: 79952681096     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/3/035022     Document Type: Article

References (36)

1. Hollar S, Flynn A, Bergbreiter S and Pister K S J 2005 Robot leg motion in a planarized-SOI, two-layer poly-Si process Microelectromech. Syst. 14 725-40 (Pubitemid 41488592)
2. Kim S-H, Hwang I-H, Jo K-W, Yoon E-S and Lee J-H 2005 High-resolution inchworm linear motor based on electrostatic twisting microactuators J. Micromech. Microeng. 15 1674-82 (Pubitemid 41205549)
3. Kwon H N, Jeong S H, lee S K and Lee J H 2003 Design and characterization of a micromachined inchworm motor with thermoelastic linkage actuators Sensors Actuators A 103 143-9
4. Tas N, Sonnenberg T, Molenaar R and Elwenspoek M 2003 Design, fabrication and testing of laterally driven electrostatic motors employing walking motion and mechanical leverage J. Micromech. Microeng. 13 N6-15
5. Liu Y-T and Wang C-W 2002 A self-moving precision positioning stage utilizing impact force of spring-mounted piezoelectric actuator Sensors and Actuators A 102 83-92 (Pubitemid 35422080)
6. Li L, Brown J G and Uttamchandani D 2002 Study of scratch drive actuator force characteristics J. Micromech. Microeng. 12 736-41 (Pubitemid 35359534)
7. Brown M, Hubbard T and Kujath M 2007 Development of a long-range untethered frictional microcrawler J. Micromech. Microeng. 17 1025-33 (Pubitemid 46656157)
8. Takeshima N, Gabriel K J, Ozaki M, Takahashi J, Horiguchi H and Fujita H Electrostatic parallelogram actuators Int. Conf. on Solid-State Sensors and Actuators (Transducers 1991) pp 63-6
9. Dai C-L, Yen K and Chang P-Z 2001 Applied electrostatic parallelogram actuators for microwave switches using the standard CMOS process J. Micromech. Microeng. 11 697-702 (Pubitemid 33084904)
10. Erismis M, Neves H, Puers R and Van Hoof Chris 2008 A low-voltage large-displacement large-force inchworm actuator J. Microelectromech. Syst. 17 1294-301
11. Pham P H, Viet Dao D and Sugiyama S 2007 A micro transportation system (MTS) with large movement of containers driven by electrostatic comb-drive actuators J. Micromech. Microeng. 17 2125-31 (Pubitemid 47469921)
12. Dao D V, Pham P H, Senkawa S and Sugiyama S Tangential and perpendicular driving micro transmission systems based on ratchet mechanism and electrostatic actuator 15th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2009) pp 45-8
13. Vogel S 1998 Cats' Paws and Catapults: Mechanical Worlds of Nature and People (New York: Norton)
14. Chan B, Balmforth N and Hosoi A 2005 Building a better snail: lubrication and adhesive locomotion Phys. Fluids 17 113101
15. Chan B, Ji S, Koveal C and Hosoi A 2007 Mechanical devices for snail-like locomotion J. Intell. Mater. Syst. Struct. 18 11-116
16. Shay B, Hubbard T and Kujath M 2008 Planar frictional micro-conveyors with two degrees of freedom J. Micromech. Microeng. 18 065009
17. Jeong O C and Konishi S 2008 The self-generated peristaltic motion of cascaded pneumatic actuators for micro pumps J. Micromech. Microeng. 18 085017
18. Darwin C 1881 The Formation of Vegetable Mould Through the Action of Worms, with Observations on their Habits (London: John Murray)
19. Edwards C and Bohlen P 1996 Biology and Ecology of Earthworms 3rd edn (London: Chapman & Hall)
20. Seymour M K 1969 Locomotion and coelomic pressure in Lumbricus terrestris L J. Exp. Biol. 51 47-58
21. Quillin K 1999 Kinematic scaling of locomotion by hydrostatic animals: ontogeny of peristaltic crawling by the earthworm Lumbricus terrestris J. Exp. Biol. 202 661-74 (Pubitemid 29184233)
22. Menciassi A, Gorini S, Pernorio G and Dario P 2004 A SMA actuated artificial earthworm Proc. 2004 IEEE Int. Conf. on Robotics and Automation 4 pp 3282-7
23. Menciassi A, Gorini S, Pernorio G and Dario P 2006 Development of a biomimetic miniature robotic crawler Auton. Robots 21 155-63 (Pubitemid 44359127)
24. Kim J and Lee J H 2005 Self-moving cell linear motor using piezoelectric stack actuators Smart Mater. Struct. 14 934-40 (Pubitemid 41344200)
25. Lumbantobing A and Komvopoulos K 2005 Static friction in polysilicon surface micromachines J. Microelectromech. Syst. 14 651-63 (Pubitemid 41488585)
26. MEMSCAP PolyMUMPs Design Handbook Revision 11.0 http://www.memscapinc. com/ (retrieved 26 November 2010)
27. Hickey R, Sameoto D, Hubbard T and Kujath M 2003 Time and Frequency response of two-arm micromachined thermal actuators J. Micromech. Microeng. 13 40-6
28. National Instruments 10 considerations when choosing vision software (retrieved on 24 November 2010) http://zone.ni.com/devzone/
29. Hariri A, Zu J W and Ben Mrad R 2006 Modeling of dry stiction in micro electro-mechanical systems (MEMS) J. Micromech. Microeng. 16 1195-206 (Pubitemid 43884495)
30. Lai Y, McDonald J, Kujath M and Hubbard T 2004 Force, deflection and power measurements of toggled microthermal actuators J. Micromech. Microeng. 14 49-56
31. Toda R and Yang E 2007 A normally latched, large-stroke, inchworm microactuator J. Micromech. Microeng. 17 1715-20 (Pubitemid 47214536)
32. Yeh R, Hollar S and Pister K S J 2002 Single mask large force, and large displacement electrostatic linear inchworm motors J. Microelectromech. Syst. 11 330-6 (Pubitemid 34950040)
33. de Boer M, Luck D, Ashurst W, Maboudian R, Corwin A, Walraven J and Redmond J 2004 High-performance surface-micromachined inchworm actuator J. Microelectromech. Syst. 13 63-74
34. Tas N, Wissink J, Sander L, Lammerink T and Elwenspoek M 1998 Modeling, design and testing of the electrostatic shuffle motor Sensors Actuators A 70 171-1
35. Sarajlic E, Berenschot E, Tas N, Fujita H, Krijnen G and Elwenspoek M 2005 High performance bidirectional electrostatic inchworm motor fabricated by trench isolation technology Proc. Transducers (Seoul, Korea, 2005) pp 53-56 (Pubitemid 41538429)
36. Sarajlic E, Yamahata C, Berenschot E, Tas N, Fujita H and Krijnen G 2010 High-performance shuffle motor fabricated by vertical trench isolation technology Micromachines 1 48-67