Effect of metastables on a sustaining mechanism in inductively coupled plasma in Ar

Journal of Applied Physics

Volumn 98, Issue 11, 2005, Pages

  Sato, Toshikazu ^a   Makabe, Toshiaki ^a  

^a KEIO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

METASTABLES; NEUTRAL RADICALS; SPATIAL DISTRIBUTION;

ELECTRIC POWER SUPPLIES TO APPARATUS; IONIZATION; PLASMA DENSITY; PLASMAS; SIGNAL FILTERING AND PREDICTION;

ARGON;

EID: 29144478382     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2137883     Document Type: Article

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