Self-consistent global model with multi-step ionizations in inductively coupled plasmas

Physics of Plasmas

Volumn 12, Issue 7, 2005, Pages 1-5

  Lee, Min Hyong ^a   Chung, Chin Wook ^a  

^a Hanyang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; ELECTRONS; ENERGY UTILIZATION; IONIZATION;

BALANCED EQUATIONS; ELECTRON TEMPERATURE; ENERGY LOSS; NEUTRAL PRESSURE;

PLASMAS;

EID: 24344471312     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1935407     Document Type: Article

References (11)

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