Effect of multistep ionizations on the electron temperature in an argon inductively coupled plasma

Applied Physics Letters

Volumn 87, Issue 13, 2005, Pages 1-3

  Lee, Min Hyong ^a   Chung, Chin Wook ^a  

^a Hanyang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON TRANSITIONS; INDUCTIVELY COUPLED PLASMA; MATHEMATICAL MODELS; MAXWELL EQUATIONS;

BALANCE EQUATION; MAXWELLIAN DISTRIBUTIONS; RADIO-FREQUENCY (RF) POWER;

IONIZATION;

EID: 28344448885     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2056592     Document Type: Article

References (12)

1. M. A. Liebermann and A. J. Lichtenberg, Principles of Plasma Discharges and Material Processing (Wiley, New York).
2. V. A. Godyak, R. B. Piejak, and B. M. Alexandrovich, Plasma Sources Sci. Technol. 11, 525 (2002).
3. V. A. Godyak, R. B. Piejak, and B. M. Alexandrovich, Plasma Sources Sci. Technol. 1, 36 (1992).
4. J. I. Fernandez Palop, J. Ballesteros, V. Colomer, and M. A. Hernandez, Rev. Sci. Instrum. 66, 4625 (1995).
5. C. W. Chung and H. Y. Chang, Appl. Phys. Lett. 80, 1725 (2002).
6. L. Vriens, R. A. J. Keijser, and F. A. S. Ligthart, J. Appl. Phys. 49, 3807 (1978).
7. M. H. Lee and C. W. Chung, Phys. Plasmas 12, 73501 (2005).
8. W. F. Edigell, Argon, Helium, and the Rare Gases (Interscience, New York, 1961), p. 132.
9. S. Ashida, C. Lee, and M. A. Lieberman, J. Vac. Sci. Technol. A 13, 2498 (1995).
10. C. M. Ferreira, J. Loureiro, and A. Richard, J. Appl. Phys. 57, 82 (1985).
11. N. Sadeghi-Kharrazi, thesis, Grenobel, 1974.
12. V. A. Godyak, Soviet Radio Frequency Discharge Research (Delphic, Falls Church, 1986).