High-tone bulk acoustic resonators on sapphire, crystal quartz, fused silica, and silicon substrates

Journal of Applied Physics

Volumn 99, Issue 12, 2006, Pages

  Zhang, Hao ^a   Pang, Wei ^a   Yu, Hongyu ^a   Kim, Eun Sok ^a  

^a University of Southern California ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC ABSORPTIONS; CRYSTAL QUARTZ; HIGH-TONE BULK ACOUSTIC RESONATORS (HBARS); SINGLE CRYSTAL SILICON;

CRYSTALS; FUSED SILICA; HIGH TEMPERATURE EFFECTS; MEASUREMENT THEORY; NATURAL FREQUENCIES; QUALITY CONTROL; SAPPHIRE; SILICON; SINGLE CRYSTALS; SUBSTRATES; THERMAL EFFECTS; VELOCITY MEASUREMENT;

ACOUSTIC RESONATORS;

EID: 33745697480     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2209029     Document Type: Article

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