High Q single-mode high-tone bulk acoustic resonator integrated with surface-micromachined FBAR filter

IEEE MTT-S International Microwave Symposium Digest

Volumn 2005, Issue , 2005, Pages 413-416

  Pang, Wei ^a   Zhang, Hao ^a   Kim, Jong Jin ^a   Yu, Hongyu ^a   Kim, Eun Sok ^a  

^a UNIVERSITY OF SOUTHERN CALIFORNIA   (United States)

Author keywords

FBAR filter; HBAR; Microwave oscillators; Surface micromaching; Xef 2 dry etching

Indexed keywords

FILM BULK ACOUSTIC RESONATOR (FBAR) FILTERS; HIGH-TONE BULK ACOUSTIC RESONATOR (HEAR); SURFACE MICROMACHING; XEF 2 DRY ETCHING;

ACOUSTIC BULK WAVE DEVICES; BANDPASS FILTERS; MICROWAVE OSCILLATORS; NATURAL FREQUENCIES; VARIABLE FREQUENCY OSCILLATORS;

ACOUSTIC RESONATORS;

EID: 33749250418     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2005.1516616     Document Type: Conference Paper

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