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Volumn , Issue , 2009, Pages 916-919
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5-10 GHZ ALN contour-mode nanoelectromechanical resonators
a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
ALN;
EXPERIMENTAL VERIFICATION;
HIGH FREQUENCY;
MULTIPLE FREQUENCY;
NANOELECTROMECHANICAL RESONATOR;
NANORESONATORS;
ON CHIPS;
PIEZOELECTRIC ACTIVITY;
POWER CONSUMING;
PIEZOELECTRIC TRANSDUCERS;
RESONATORS;
PIEZOELECTRICITY;
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EID: 65949105070
PISSN: 10846999
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/MEMSYS.2009.4805533 Document Type: Conference Paper |
Times cited : (114)
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References (14)
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