LiNbO3-LiNbO3 high overtone bulk acoustic resonator exhibiting high Q.f product

Proceedings - IEEE Ultrasonics Symposium

Volumn , Issue , 2007, Pages 1417-1420

  Gachon, D ^a   Courjon, E ^a   Masson, J ^a   Petrini, V ^a   Rauch, J Y ^a   Ballandras, S ^a  

^a CNRS   (France)

Author keywords

HBAR; High quality factor; Lithium niobate; Wafer bonding

Indexed keywords

ACOUSTIC RESONATORS; ACOUSTICS; CHEMICAL VAPOR DEPOSITION; MOLECULAR BEAM EPITAXY; SINGLE CRYSTALS; THICK FILMS; ULTRASONICS; WAVE FILTERS;

BULK ACOUSTIC WAVES; FREQUENCY SOURCES; HBAR; HIGH FREQUENCIES; HIGH QUALITY FACTOR; HIGH-QUALITY; LITHIUM NIOBATE; PIEZOELECTRIC FILMS; PLATE THICKNESS; RF FILTERING; SINGLE-CRYSTAL WAFERS; THIN-FILM DEPOSITIONS; WAVE CHARACTERISTICS;

WAFER BONDING;

EID: 48149113945     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2007.356     Document Type: Conference Paper

References (6)

1. KM. Lakin, G.R. Kline, R.S. Ketcham, A.R. Landin, W.A. Burkland, K.T. McCarron, S.D. Braymen, and S.G. Bums, "Thin Film Resonators Technology", IEEE International Frequency Control Symposium, pp. 371-, 1987.
2. G. J. Coussot, "Bulk Wave Resonator for the 100-300 MHz frequency range", IEEE Ultrasonics Symposium, pp. 590-, 1974.
3. M.I. Grace, R.W.Kedzie, M. Kestigian, and A.B. Smith, 'Elastic Wave Attenuation In Lithium Niobate", Appl. Phys. Lett. 9 (4), pp. 155-, 1966.
4. P. Murait, J. Antifakos, M. Cantoni, R. Lanz, F. Martin, "Is There a Better Material for Thin Film BAW Applications than AIN?", Proc. of the IEEE Ultrasonics Symposium, pp. 315-320, 2005
5. A Reinhardt, Th Pastureaud, V. Laude, S. Ballandras, "Scattering matrix method for acoustic waves in piezoelectric, fluid, and metallic multilayers", J. Appl. Phys., Vol. 94, pp. 6923-6931, 2003
6. K.M. Lakin, G.R. Kline, K.T. McCarron, "High-Q Microwave Acoustic Resonators and Filters",IEEE Trans. on MTT, Vol. 41, No.12, pp 2139-2146, 1993