Fabrication of miniaturized bi-convex quartz crystal microbalance using reactive ion etching and melting photoresist

Sensors and Actuators, A: Physical

Volumn 114, Issue 2-3, 2004, Pages 496-500

  Li, Li ^a   Abe, Takashi ^a,b   Esashi, Masayoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

Author keywords

Bi convex; Melting photoresist technology; Q factor; Quartz crystal microbalance (QCM); Reactive ion etching (RIE)

Indexed keywords

ANISOTROPY; ENERGY DISSIPATION; FABRICATION; PHOTORESISTS; QUARTZ; REACTIVE ION ETCHING; SENSORS; SINGLE CRYSTALS; SURFACE ROUGHNESS;

MELTING PHOTORESIST TECHNOLOGY; Q-FACTOR; QUARTZ CRYSTAL MICROBALANCE (QCM);

CRYSTAL RESONATORS;

EID: 4344622548     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2003.12.031     Document Type: Article

References (11)

1. Sauerbrey G. Verwendung von schwingquarsen zur wängung dünner schichten und zur mikrowängung. Z. Phys. 155:1959;206-222.
2. Shockley W., Curran D.R., Koneval D.J. Trapped-energy modes in quartz filter crystals. J. Acoust. Soc. Am. 41:1967;981-993.
3. Goka S., Sekimoto H., Watanabe Y., Sato K. Frequency-temperature behavior of stepped bi-mesa-shaped at-cut quartz resonators. Jpn. J. Appl. Phys. 39:2000;3054-3055.
4. L. Li, T. Abe, M. Esashi, High sensitive, miniaturized plano-convex quartz crystal microbalance fabricated by reactive ion etching and melting photoresist, in: Proceedings of the Transducers'03, pp. 508-511.
5. Zimmermann B., Lucklum R., Hauptmann P., Rabe J., Büttgenbach S. Electrical characterisation of high-frequency thickness-shear-mode resonators by impedance analysis. Sens. Actuators B. 76:2001;47-57.
6. 6/Xe gas, J. Vac. Sci. Technol. B 21 (2003) 2545-2549.
7. (a) T. Abe, M. Esashi, One-chip multichannel quartz crystal microbalance (QCM) fabricated by deep RIE, Technical Digest of Transducer'99, 1999, pp. 1246-1249.
8. (b) Abe T., Esashi M. One-chip multichannel quartz crystal microbalance (QCM) fabricated by deep RIE. Sens. Actuators A. 82:2000;139-143.
9. Hung V.N., Abe T., Minh P.N., Esashi M. Miniaturized, highly sensitive single-chip multichannel quartz-crystal microbalance. Appl. Phys. Lett. 81:2002;5069.
10. Martin S.J., Granstaff V.E., Frye G.C. Using crystal microbalances to simultaneous sense mass accumulation and solution properties. Anal. Chem. 63:1991;2272-2281.
11. S. Koller, J.G. Korvink, H. Baltes, Monitoring desk-jet inks and silicon oils with thickness shear mode resonator, in: Proceedings of the Transdusers'97, 1997, pp. 125-128.