A 1.75 GHz piezoelectrically-transduced SiC lateral overmoded bulk acoustic-wave resonator

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Volumn , Issue , 2011, Pages 922-925

  Gong, Songbin ^a   Kuo, Nai Kuei ^a   Piazza, Gianluca ^a  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

AlN; LOBAR; MEMS resonators; piezoelectric; SiC

Indexed keywords

ALN; LOBAR; MEMS RESONATORS; PIEZOELECTRIC; SIC;

ACOUSTIC FIELDS; ACOUSTIC TRANSDUCERS; BACTERIOPHAGES; HIGH TEMPERATURE APPLICATIONS; HIGH TEMPERATURE OPERATIONS; MICROELECTROMECHANICAL DEVICES; MICROSYSTEMS; PIEZOELECTRIC ACTUATORS; PIEZOELECTRICITY; RESONATORS; SOLID-STATE SENSORS; TRANSDUCERS;

SILICON CARBIDE;

EID: 80052128868     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TRANSDUCERS.2011.5969701     Document Type: Conference Paper

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