Thin-film piezoelectric-on-substrate resonators with Q enhancement and TCF reduction

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2010, Pages 727-730

  Pan, Wanling ^a   Ayazi, Farrokh ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALN; IN-VACUUM; LATERAL MODES; METAL ELECTRODES; PIEZOELECTRIC LAYERS; Q ENHANCEMENT; QUALITY FACTORS; SI SUBSTRATES; TEMPERATURE COEFFICIENT OF FREQUENCIES; THIN FILM PIEZOELECTRIC; VOLUME RATIO;

BANDPASS FILTERS; MECHANICAL ENGINEERING; MECHANICS; PIEZOELECTRICITY; Q FACTOR MEASUREMENT; REACTIVE ION ETCHING; RESONATORS; SILICON;

SUBSTRATES;

EID: 77952757612     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2010.5442303     Document Type: Conference Paper

References (4)

1. Reza Abdolvand and Farrokh Ayazi, "Enhanced power handling and quality factor in thin-film piezoelectric-on-substrate resonators", in Proc. 2007 IEEE Ultrasonics Symposium, pp. 608 - 611, 2007.
2. Wanling Pan, Reza Abdolvand, and Farrokh Ayazi, "A low-loss 1.8GHz monolithic thin-film piezoelectric-on-substrate filter", in Tech. Digest MEMS 2008 Conference, pp. 176 - 179, 2008.
3. P. Csavinszky and Norman G. Einspruch, "Effect of doping on the elastic constants of silicon", Physical Review Letters, vol. 132 no. 6, pp. 2434 - 2440, 1963.
4. Ashwin K. Samarao and Farrokh Ayazi, "Temperature compensation of silicon micromechanical resonators via degenerate doping", to be presented at IEDM 2009.