Role of excited atoms in decaying low-pressure argon plasma

Physical Review E - Statistical, Nonlinear, and Soft Matter Physics

Volumn 74, Issue 6, 2006, Pages

  Gorchakov, Sergey ^a   Loffhagen, Detlef ^a   Uhrlandt, Dirk ^a  

^a INP GREIFSWALD   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; ELECTRIC DISCHARGES; ELECTRON ENERGY LEVELS; INDUCTIVELY COUPLED PLASMA; IONIZATION; REACTION KINETICS;

ARGON PLASMA; ELECTRON POWER BALANCE; RF DISCHARGE;

ELECTRIC EXCITATION;

EID: 33845366648     PISSN: 15393755     EISSN: 15502376     Source Type: Journal    
DOI: 10.1103/PhysRevE.74.066401     Document Type: Article

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