Comparison between Langmuir probe and microwave autointerferometry measurements at intermediate pressure in an argon surface wave discharge

Journal of Applied Physics

Volumn 98, Issue 8, 2005, Pages

  Rousseau, A ^a   Teboul, E ^b   Bechu S ^c  

^a ECOLE POLYTECHNIQUE   (France)

^b HORIBA LTD   (Japan)

^c UNIVERSITÉ JOSEPH FOURIER GRENOBLE 1   (France)

Author keywords

[No Author keywords available]

Indexed keywords

COLLISIONAL PHENOMENA; LANGMUIR PROBES; MICROWAVE AUTOINTERFEROMETRY; SURFACE WAVE DISCHARGE;

INTERFEROMETRY; MICROWAVES; PLASMA COLLISION PROCESSES; PLASMA SHEATHS; PRESSURE EFFECTS; PROBES; RAYLEIGH FADING;

SURFACE WAVES;

EID: 27744533207     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2112172     Document Type: Article

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