SEM-induced shrinking of solid-state nanopores for single molecule detection

Nanotechnology

Volumn 22, Issue 42, 2011, Pages

  Prabhu, Anmiv S ^a   Freedman, Kevin J ^b   Robertson, Joseph W F ^c   Nikolov, Zhorro ^a   Kasianowicz, John J ^c   Kim, Min Jun ^a,b  

^a DREXEL UNIVERSITY   (United States)

^b Drexel University   (United States)

^c NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELERATING VOLTAGES; BEAM PARAMETER; DOUBLE STRANDED DNA; ELECTRON BEAM-INDUCED DEPOSITION; ELECTRON FLUX; ENERGY-DEPENDENT PROCESS; MATERIAL FLOW; NANOPORE MEMBRANES; SCANNING ELECTRON MICROSCOPE; SINGLE-MOLECULE DETECTION; SOLID-STATE NANOPORE;

HYDROCARBONS; SCANNING ELECTRON MICROSCOPY;

NANOPORES;

DNA; VIRUS DNA;

ARTICLE; BACTERIOPHAGE LAMBDA; ELECTRIC CONDUCTIVITY; EVALUATION; GENETIC PROCEDURES; GENETICS; METHODOLOGY; NANOPORE; POROSITY; SCANNING ELECTRON MICROSCOPY; SENSITIVITY AND SPECIFICITY; ULTRASTRUCTURE;

BACTERIOPHAGE LAMBDA; BIOSENSING TECHNIQUES; DNA; DNA, VIRAL; ELECTRIC CONDUCTIVITY; MICROSCOPY, ELECTRON, SCANNING; NANOPORES; POROSITY; SENSITIVITY AND SPECIFICITY;

EID: 80053268786     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/22/42/425302     Document Type: Article

References (34)

1. Kasianowicz J J et al 2008 Nanoscopic porous sensors Annu. Rev. Anal. Chem. 1 737-66
2. Mulero R et al 2010 Nanopore-based devices for bioanalytical applications J. Assoc. Lab. Autom. 15 243-52
3. Dekker C 2007 Solid-state nanopores Nature Nanotechnol. 2 209-15 (Pubitemid 46739810)
4. Howorka S and Siwy Z 2009 Nanopore analytics: sensing of single molecules Chem. Soc. Rev. 38 2360-84
5. Kim M J, Robertson J W F and Kasianowicz J J 2009 Single molecule analysis using single nanopores Nanofluidic: Nanoscience and Nanotechnology (Cambridge: Royal Society of Chemistry)
6. Kasianowicz J et al 1996 Characterization of individual polynucleotide molecules using a membrane channel Proc. Natl Acad. Sci. USA 93 13770-3 (Pubitemid 26424195)
7. Montal M and Mueller P 1972 Formation of bimolecular membranes from lipid monolayers and a study of their electrical properties Proc. Natl Acad. Sci. USA 69 3561-6
8. Storm A et al 2003 Fabrication of solid-state nanopores with single-nanometre precision Nature Mater. 2 537-40
9. Kim M et al 2006 Rapid fabrication of uniformly sized nanopores and nanopore arrays for parallel DNA analysis Adv. Mater. 18 3149-53 (Pubitemid 46080209)
10. Li J et al 2001 Ion-beam sculpting at nanometre length scales Nature 412 166-9 (Pubitemid 32674708)
11. Mitsui T et al 2006 Nanoscale volcanoes: accretion of matter at ion-sculpted nanopores Phys. Rev. Lett. 96 036102
12. George H B et al 2010 Nanopore fabrication in amorphous Si: viscous flow model and comparison to experiment J. Appl. Phys. 108 014310
13. Schenkel T et al 2003 Formation of a few nanometer wide holes in membranes with a dual beam focused ion beam system J. Vac. Sci. Technol. B 21 2720-3
14. Chang H et al 2006 Fabrication and characterization of solid-state nanopores using a field emission scanning electron microscope Appl. Phys. Lett. 88 103109
15. Zhang W et al 2007 Controllable shrinking and shaping of silicon nitride nanopores under electron irradiation Appl. Phys. Lett. 90 163102
16. Kox R et al 2009 Shrinking solid-state nanopores using electron-beam-induced deposition Nanotechnology 20 115302
17. Spinney P et al 2010 Nanopore formation by low-energy focused electron beam machining Nanotechnology 21 375301
18. Danelon C et al 2006 Fabrication and functionalization of nanochannels by electron-beam-induced silicon oxide deposition Langmuir 22 10711-5 (Pubitemid 46051757)
19. Smeets R et al 2006 Salt dependence of ion transport and DNA translocation through solid-state nanopores Nano Lett. 6 89-95 (Pubitemid 43166107)
20. Chen P et al 2004 Probing single DNA molecule transport using fabricated nanopores Nano Lett. 4 2293-8
21. Radenovic A et al 2008 Fabrication of 10 nm diameter hydrocarbon nanopores Appl. Phys. Lett. 93 183101
22. Hren J J, Goldstein J I and Joy D C 1979 Introduction to Analytical Electron Microscopy (New York: Plenum)
23. Smith D A et al 2007 A nanoscale three-dimensional Monte Carlo simulation of electron-beam-induced deposition with gas dynamics Nanotechnology 18 265308
24. Patterson N et al 2008 Controlled fabrication of nanopores using a direct focused ion beam approach with back face particle detection Nanotechnology 19 235304
25. Wu M Y et al 2010 TEM study of locally coated nanopore fabricated by ion-beam-induced deposition in a thin membrane Micron 41 609-14
26. Tseng A 2004 Recent developments in micromilling using focused ion beam technology J. Micromech. Microeng. 14 R15-34
27. Lehmann G et al 2001 Structure and elastic properties of amorphous silicon carbon nitride films Phys. Rev. B 64 165305
28. Ohring M 1992 The Materials Science of Thin Films (New York: Academic)
29. Mayr S and Samwer K 2001 Model for intrinsic stress formation in amorphous thin films Phys. Rev. Lett. 87 36105
30. Goldstein J et al 2003 Scanning Electron Microscopy and X-ray Microanalysis (Berlin: Springer)
31. Kanaya K and Okayama S 1972 Penetration and energy-loss theory of electrons in solid targets J. Phys. D: Appl. Phys. 5 43-58
32. Drouin D et al 2007 CASINO V2. 42 - a fast and easy to use modeling tool for scanning electron microscopy and microanalysis users Scanning 29 92-101 (Pubitemid 46944994)
33. Hall J 1975 Access resistance of a small circular pore J. Gen. Physiol. 66 531-2
34. Prabhu A et al 2010 Chemically modified solid state nanopores for high throughput nanoparticle separation J. Phys.: Condens. Matter 22 454107