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Physical Review B - Condensed Matter and Materials Physics

Volumn 64, Issue 16, 2001, Pages 1653051-16530510

Structure and elastic properties of amorphous silicon carbon nitride films

(10) Lehmann, G a Hess, P a Wu, J J b Wu, C T b Wong, T S b Chen, K H b Chen, L C c Lee, H Y d Amkreutz, M e Frauenheim, Th e

a UNIVERSITY OF HEIDELBERG (Germany)

b INSTITUTE OF ATOMIC AND MOLECULAR SCIENCES (Taiwan)

c NATIONAL TAIWAN UNIVERSITY (Taiwan)

d NATIONAL SYNCHROTRON RADIATION RESEARCH CENTER (Taiwan)

e UNIVERSITY OF PADERBORN (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; NITRIC ACID DERIVATIVE; SILICON DERIVATIVE;

ACOUSTICS; ARTICLE; CHEMICAL COMPOSITION; DENSITY GRADIENT; ELASTICITY; FILM; INFRARED SPECTROSCOPY; MOLECULAR DYNAMICS; SPECTROSCOPY; STRUCTURE ANALYSIS; YOUNG MODULUS;

EID: 0035886591 PISSN: 01631829 EISSN: None Source Type: Journal
DOI: 10.1103/PhysRevB.64.165305 Document Type: Article

Times cited : (55)

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