Fabrication of 10 nm diameter hydrocarbon nanopores

Applied Physics Letters

Volumn 93, Issue 18, 2008, Pages

  Radenovic, Aleksandra ^a,c   Trepagnier, Eliane ^a,d   Csencsits, Roseann ^b   Downing, Kenneth H ^b   Liphardt, Jan ^a,b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^c EPFL   (Switzerland)

^d STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCURATE ANALYSIS; DIMENSIONAL MODELS; FOCUSED ELECTRON BEAMS; SALT CONCENTRATIONS; SILICON NITRIDE MEMBRANES; TRANSMISSION ELECTRON MICROSCOPES;

DEPOSITION RATES; ELECTRON BEAMS; HYDROCARBONS; ION BOMBARDMENT; NANOPORES; NANOSTRUCTURED MATERIALS; NITRIDES; SILICON; SILICON NITRIDE; TRANSMISSION ELECTRON MICROSCOPY;

ORGANIC COMPOUNDS;

EID: 55849142601     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3012376     Document Type: Article

References (30)

1. H. Yan and B. Q. Xu, Small 2, 310 (2006).
2. B. Hornblower, A. Coombs, R. D. Whitaker, A. Kolomeisky, S. J. Picone, A. Meller, and M. Akeson, Nat. Methods 4, 315 (2007).
3. R. Bundschuh and T. Hwa, Phys. Rev. Lett. 83, 1479 (1999).
4. U. Gerland, R. Bundschuh, and T. Hwa, Biophys. J. 81, 1324 (2001).
5. U. F. Keyser, B. N. Koeleman, S. Van Dorp, D. Krapf, R. M. M. Smeets, S. G. Lemay, and N. H. Dekker, Nat. Phys. 2, 473 (2006).
6. E. H. Trepagnier, A. Radenovic, D. Sivak, P. Geissler, and J. Liphardt, Nano Lett. 1530-6984 10.1021/nl0714334 7, 2824 (2007).
7. J. Li, D. Stein, C. McMullan, D. Branton, M. J. Aziz, and J. A. Golovchenko, Nature (London) 0028-0836 10.1038/35084037 412, 166 (2001).
8. A. J. Storm, J. H. Chen, X. S. Ling, H. W. Zandbergen, and C. Dekker, Nature Mater. 1476-1122 10.1038/nmat941 2, 537 (2003).
9. C. Ho, R. Qiao, J. B. Heng, A. Chatterjee, R. J. Timp, N. R. Aluru, and G. Timp, Proc. Natl. Acad. Sci. U.S.A. 0027-8424 10.1073/pnas.0500796102 102, 10445 (2005).
10. M. Y. Wu, D. Krapf, M. Zandbergen, H. Zandbergen, and P. E. Batson, Appl. Phys. Lett. 87, 113106 (2005).
11. R. R. Henriquez, T. Ito, L. Sun, and R. M. Crooks, Analyst (Cambridge, U.K.) 0003-2654 10.1039/b404251b 129, 478 (2004).
12. O. A. Saleh and L. L. Sohn, Nano Lett. 1530-6984 10.1021/nl0255202 3, 37 (2003).
13. S. R. Park, H. B. Peng, and X. S. S. Ling, Small 1613-6810 10.1002/smll.200600268 3, 116 (2007).
14. Z. Siwy and A. Fulinski, Phys. Rev. Lett. 89, 198103 (2002).
15. M. Kim, M. Wanunu, D. C. Bell, and A. Meller, Adv. Mater. (Weinheim, Ger.) 18, 3149 (2006).
16. J. J. Hren, J. I. Goldstein, and D. C. Joy, Introduction for Analytical Electron Microscopy (Plenum, New York, 1979).
17. A. N. Broers, W. W. Molzen, J. J. Cuomo, and N. D. Wittels, Appl. Phys. Lett. 0003-6951 10.1063/1.89155 29, 596 (1976).
18. C. H. Jin, J. Y. Wang, Q. Chen, and L. M. Peng, J. Phys. Chem. B 1089-5647 10.1021/jp057240r 110, 5423 (2006).
19. H. Konuma, Mikrochim. Acta 2, 99 (1983).
20. K. Ueda and M. Yoshimura, Thin Solid Films 464, 331 (2004).
21. S. D. Johnson, D. G. Hasko, K. B. K. Teo, W. I. Milne, and H. Ahmed, Microelectron. Eng. 61, 665 (2002).
22. B. Hubner, H. W. P. Koops, H. Pagnia, N. Sotnik, J. Urban, and M. Weber, Ultramicroscopy 0304-3991 10.1016/0304-3991(92)90476-Z 42, 1519 (1992).
23. T. Schenkel, V. Radmilovic, E. A. Stach, S. J. Park, and A. Persaud, J. Vac. Sci. Technol. B 1071-1023 10.1116/1.1622935 21, 2720 (2003).
24. T. C. Isabell, P. E. Fischione, C. O. O'Keefe, M. U. Guruz, and V. P. Dravid, Microscopy and Analysis 5, 126 (1999).
25. L. Reimer, Scanning Electron Microscopy (Springer, Berlin, 1985).
26. S. A. Spronk, D. E. Elmore, and D. A. Dougherty, Biophys. J. 90, 3555 (2006). 0006-3495
27. T. Okazaki, M. Sakoh, Y. Nagaoka, and K. Asami, Biophys. J. 85, 267 (2003). 0006-3495
28. A. Fulinski, I. Kosinska, and Z. Siwy, New J. Phys. 7, 132 (2005).
29. Z. Siwy, P. Apel, D. Baur, D. D. Dobrev, Y. E. Korchev, R. Neumann, R. Spohr, C. Trautmann, and K. O. Voss, Surf. Sci. 532, 1061 (2003).
30. M. von Smoluchowski, Ann. Phys. 21, 756 (1906).