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Physical Review Letters

Volumn 87, Issue 3, 2001, Pages 361051-361054

Model for intrinsic stress formation in amorphous thin films

(2) Mayr, S G a Samwer, K a

a UNIVERSITY OF GÖTTINGEN (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; FILM PREPARATION; GRAIN BOUNDARIES; INTERFACIAL ENERGY; METALLIC FILMS; STRESS ANALYSIS; SURFACE TOPOGRAPHY; TENSILE STRESS;

INTRINSIC STRESESS;

THIN FILMS;

EID: 0001692347 PISSN: 00319007 EISSN: None Source Type: Journal
DOI: 10.1103/PhysRevLett.87.036105 Document Type: Article

Times cited : (76)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.