Shrinking solid-state nanopores using electron-beam-induced deposition

Nanotechnology

Volumn 20, Issue 11, 2009, Pages

  Kox, Ronald ^a,b   Chen, Chang ^a,c   Maes, Guido ^c   Lagae, Liesbet ^a,c   Borghs, Gustaaf ^a,c  

^a IMEC   (Belgium)

^b Katholieke Universiteit Leuven   (Belgium)

^c UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPIC WET ETCHINGS; DNA SEQUENCING; ELECTRON-BEAM-INDUCED DEPOSITIONS; FREE-STANDING MEMBRANES; HIGH-ENERGY BEAMS; MOLECULE DETECTIONS; NANOMETRES; NOVEL METHODS; SCANNING ELECTRON MICROSCOPES; SILICON MEMBRANES; SMALL HOLES; SOLID-STATE NANOPORES; TRANSMISSION ELECTRON MICROSCOPES; UNDERLYING MECHANISMS;

ELECTRONS; FOCUSED ION BEAMS; MICROSCOPES; NUCLEIC ACIDS; SCANNING ELECTRON MICROSCOPY; SHRINKAGE; TRANSMISSION ELECTRON MICROSCOPY;

NANOPORES;

CARBON; SILICON;

ARTICLE; CHEMICAL REACTION; ELECTRON BEAM; ELECTROSTIMULATION; NANOFABRICATION; NANOPORE; PARTICLE SIZE; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPE; SOLID STATE;

EID: 65449149511     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/20/11/115302     Document Type: Article

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