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Volumn 46, Issue 11, 2011, Pages 1975-1979
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Effect of oxygen flow rate and radio-frequency power on the photoconductivity of highly ultraviolet sensitive ZnO thin films grown by magnetron sputtering
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Author keywords
A. Oxides; A. Thin films; B. Electrical properties; B. Sputtering; D. Defects
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Indexed keywords
CURRENT RATIOS;
EFFECT OF OXYGEN;
ELECTRICAL MEASUREMENT;
OXYGEN CONTENT;
OXYGEN FLOW RATES;
PHOTOCURRENT SPECTRUM;
RADIO FREQUENCY POWER;
RF-POWER;
SENSITIVE FILMS;
STRUCTURAL QUALITIES;
VISIBLE AND ULTRAVIOLET;
ZNO THIN FILM;
CARRIER CONCENTRATION;
CONDUCTIVE FILMS;
DEFECTS;
ELECTRIC PROPERTIES;
FLOW RATE;
METALLIC FILMS;
OPTICAL FILMS;
OXYGEN;
PHOTOCONDUCTIVITY;
THIN FILMS;
ZINC OXIDE;
OXYGEN VACANCIES;
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EID: 80052832219
PISSN: 00255408
EISSN: None
Source Type: Journal
DOI: 10.1016/j.materresbull.2011.07.019 Document Type: Article |
Times cited : (15)
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References (37)
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