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Volumn 46, Issue 7, 2011, Pages 1039-1044

Effect of substrate-induced strain on the morphological, electrical, optical and photoconductive properties of RF magnetron sputtered ZnO thin films

(3) Ghosh, T a Dutta, M a Basak, D a

a DEPARTMENT OF MATERIALS SCIENCE (India)

Author keywords

Electrical properties; Microstructure; Sputtering; Thin films

Indexed keywords

COMPRESSIVE STRAIN; DIFFERENT SUBSTRATES; ELECTRICAL PROPERTY; PHOTOCONDUCTIVE PROPERTIES; QUARTZ SUBSTRATE; RADIO FREQUENCY MAGNETRON SPUTTERING; RF MAGNETRONS; SI(1 0 0); SUBSTRATE-INDUCED STRAIN; UV EMISSIONS; ZNO THIN FILM;

CARRIER CONCENTRATION; CRYSTALLITE SIZE; ELECTRIC PROPERTIES; MAGNETRON SPUTTERING; METALLIC FILMS; OPTICAL FILMS; PHOTOCONDUCTIVITY; QUARTZ; THIN FILMS; ZINC OXIDE;

SUBSTRATES;

EID: 79956347504 PISSN: 00255408 EISSN: None Source Type: Journal
DOI: 10.1016/j.materresbull.2011.03.011 Document Type: Article

Times cited : (35)

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