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Volumn 19, Issue 4, 2002, Pages 461-469
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Structure-composition-property dependence in reactive magnetron sputtered ZnO thin films
a b a c |
Author keywords
[No Author keywords available]
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Indexed keywords
CHARGE CARRIERS;
CRYSTAL STRUCTURE;
ELECTRIC CONDUCTIVITY;
GRAIN BOUNDARIES;
MAGNETRON SPUTTERING;
OPACITY;
PARTIAL PRESSURE;
POLYCRYSTALLINE MATERIALS;
SCATTERING;
STOICHIOMETRY;
SUBSTRATES;
THERMAL EFFECTS;
ZINC OXIDE;
HALL MOBILITY;
THIN FILMS;
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EID: 0036603757
PISSN: 09253467
EISSN: None
Source Type: Journal
DOI: 10.1016/S0925-3467(02)00028-9 Document Type: Article |
Times cited : (40)
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References (29)
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