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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 45, Issue 4 B, 2006, Pages 3531-3536

The preparation of piezoelectric ZnO films by rf magnetron sputtering for layered surface acoustic wave device applications

(5) Liu, Day Shan a Wu, Cheng Yang a Sheu, Chia Sheng a Tsai, Fu Chun a Li, Cheng Hsien a

a NATIONAL FORMOSA UNIVERSITY (Taiwan)

Author keywords

Intrinsic stress; Layered SAW device; Piezoelectric ZnO films; Post annealing; rf magnetron sputtering

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ANNEALING; MAGNETRON SPUTTERING; PIEZOELECTRIC DEVICES; SURFACE ROUGHNESS; ZINC OXIDE;

INTRINSIC STRESS; LAYERED SAW DEVICE; POSTANNEALING; RF MAGNETRON SPUTTERING;

THIN FILMS;

EID: 33646938001 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.45.3531 Document Type: Article

Times cited : (26)

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