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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 29, Issue 5, 2011, Pages

Experimental verification of the shape of the excitation depth distribution function for AES

(2) Tougaard, S a Jablonski, A b

a UNIVERSITY OF SOUTHERN DENMARK (Denmark)

b INSTITUTE OF PHYSICAL CHEMISTRY (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON; ELECTRON ENERGY SPECTRUM; ELECTRON TRAJECTORIES; EXPERIMENTAL DETERMINATION; EXPERIMENTAL VERIFICATION; INELASTICALLY SCATTERED; LOW ENERGIES; MONTE CARLO SIMULATION; PRIMARY ELECTRONS;

COMPUTER SIMULATION; DISSOCIATION; ELECTRON ENERGY LEVELS; ELECTRON PROBE MICROANALYSIS; ELECTRONS; IONIZATION; MONTE CARLO METHODS; SPECTROSCOPY;

DISTRIBUTION FUNCTIONS;

EID: 80052392397 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.3609774 Document Type: Article

Times cited : (1)

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